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1. WO2021007039 - WAVEGUIDE INTEGRATION WITH OPTICAL COUPLING STRUCTURES ON LIGHT DETECTION DEVICE

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Publication Number WO/2021/007039
Publication Date 14.01.2021
International Application No. PCT/US2020/039552
International Filing Date 25.06.2020
IPC
G01N 27/447 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
416Systems
447using electrophoresis
G01N 27/414 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
403Cells and electrode assemblies
414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
G01N 21/64 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63optically excited
64Fluorescence; Phosphorescence
H01L 21/82 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
78with subsequent division of the substrate into plural individual devices
82to produce devices, e.g. integrated circuits, each consisting of a plurality of components
H01L 27/146 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
144Devices controlled by radiation
146Imager structures
Applicants
  • ILLUMINA, INC. [US]/[US]
Inventors
  • EMADI, Arvin
  • RIVAL, Arnaud
  • ABEILLE, Fabien
  • AGAH, Ali
  • CIESLA, Craig
  • KARUNAKARAN, Aathavan
Agents
  • PEARLMAN, Rachel L.
Priority Data
62/871,59608.07.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) WAVEGUIDE INTEGRATION WITH OPTICAL COUPLING STRUCTURES ON LIGHT DETECTION DEVICE
(FR) INTÉGRATION DE GUIDE D'ONDES AVEC DES STRUCTURES DE COUPLAGE OPTIQUE SUR UN DISPOSITIF DE DÉTECTION DE LUMIÈRE
front page image
Abstract
(EN)
Provided herein include various examples of an apparatus, flow cells that include these examples of the apparatus, and methods of making these examples of the apparatus. The apparatus can include a molding layer over a substrate and covering sides of a light detection device. The molding layer comprises a first region and a second region, which, with the active surface of the light detection device, form a contiguous surface. A waveguide integration layer is between the contiguous surface and a waveguide. The waveguide integration layer comprises optical coupling structures over the first and second regions, to optically couple light waves from a light source to the waveguide. The waveguide utilizes the light waves to excite light sensitive materials in nanowells. A nanostructure layer over the waveguide comprises the nanowells. Each nanowell shares a vertical axis with a location on the active surface of the light detection device.
(FR)
L'invention concerne divers exemples d'un appareil, des cellules à circulation comprenant lesdits exemples de l'appareil, ainsi que des procédés de fabrication desdits exemples de l'appareil. L'appareil peut comprendre une couche de moulage, sur un substrat, qui recouvre les côtés d'un dispositif de détection de lumière. La couche de moulage comprend une première région et une seconde région, qui forment, avec la surface active du dispositif de détection de lumière, une surface contiguë. Une couche d'intégration de guide d'ondes est située entre la surface contiguë et un guide d'ondes. La couche d'intégration de guide d'ondes comprend des structures de couplage optique sur les première et seconde régions, afin de coupler optiquement des ondes lumineuses d'une source de lumière au guide d'ondes. Le guide d'ondes utilise les ondes lumineuses pour exciter des matériaux sensibles à la lumière dans des nano-puits. Une couche de nano-structure sur le guide d'ondes comporte les nano-puits. Chaque nano-puits partage un axe vertical avec un emplacement sur la surface active du dispositif de détection de lumière.
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