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1. WO2021007003 - MULTIPLE PLANES OF TRANSISTORS WITH DIFFERENT TRANSISTOR ARCHITECTURES TO ENHANCE 3D LOGIC AND MEMORY CIRCUITS


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2020/038044 190742WO01
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
17 June 2020 08 July 2019
Applicant
TOKYO ELECTRON LIMITED et al.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     12B    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/8238 (2006.01)i; H01L 29/423 (2006.01)i; H01L 29/786 (2006.01)i; H01L 27/092 (2006.01)i; H01L 29/51 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & keywords: gate-all-around FET, different threshold, channel

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
Y
US 2015-0179640 A1 (GLOBALFOUNDRIES INC.) 25 June 2015 paragraphs [0033]-[0047], claim 1 and figures 1-7
16-17
A
1-15,18-20
(2)
Y
KR 10-2019-0026018 A (TOKYO ELECTRON LIMITED) 12 March 2019 paragraph [0021] and figure 1
16-17
(3)
Y
US 2016-0284810 A1 (INTERNATIONAL BUSINESS MACHINES CORPORATION) 29 September 2016 paragraph [0093], claim 1 and figures 20-25
17
(4)
A
US 9553031 B1 (LAM RESEARCH CORPORATION) 24 January 2017 the entire document
1-20
(5)
A
US 8580624 B2 (SARUNYA BANGSARUNTIP et al.) 12 November 2013 the entire document
1-20
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2015-0179640 A1
25 June 2015
None
KR 10-2019-0026018 A
12 March 2019
CN 109643715 A
CN 109643725 A
JP 2018-026565 A
JP 2019-523553 A
JP 2019-525484 A
KR 10-2018-0018426 A
KR 10-2019-0035804 A
TW 201813055 A
TW 201817001 A
TW 201818476 A
US 10453850 B2
US 10529830 B2
US 10573655 B2
US 2018-0026042 A1
US 2018-0040695 A1
US 2018-0047832 A1
US 2018-0240802 A1
US 2019-0326301 A1
US 2020-0098897 A1
US 9997598 B2
WO 2018-017677 A1
WO 2018-031528 A1
16 April 2019
16 April 2019
15 February 2018
22 August 2019
05 September 2019
21 February 2018
03 April 2019
01 April 2018
01 May 2018
16 May 2018
22 October 2019
07 January 2020
25 February 2020
25 January 2018
08 February 2018
15 February 2018
23 August 2018
24 October 2019
26 March 2020
12 June 2018
25 January 2018
15 February 2018
US 2016-0284810 A1
29 September 2016
CN 106024716 A
CN 106024716 B
DE 102016105486 A1
DE 102016105486 B4
US 2016-0359011 A1
US 9443949 B1
US 9564502 B2
12 October 2016
23 November 2018
29 September 2016
17 October 2019
08 December 2016
13 September 2016
07 February 2017
US 9553031 B1
24 January 2017
CN 107452683 A
KR 10-2017-0113171 A
TW 201803027 A
08 December 2017
12 October 2017
16 January 2018
US 8580624 B2
12 November 2013
US 2013-0105897 A1
US 2014-0027855 A1
US 8809957 B2
02 May 2013
30 January 2014
19 August 2014
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
28 September 2020
Date of mailing of the international search report:
28 September 2020
Authorized officer:
PARK, Hye Lyun
Telephone No. +82-42-481-3463
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