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1. WO2020231172 - METHOD FOR MANUFACTURING MOLD FOR MANUFACTURING FINE METAL MASK, AND METHOD FOR MANUFACTURING FINE METAL MASK

Publication Number WO/2020/231172
Publication Date 19.11.2020
International Application No. PCT/KR2020/006277
International Filing Date 13.05.2020
IPC
H01L 51/56 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
56Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
H01L 51/00 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
C23C 14/04 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
Applicants
  • 크레아퓨쳐 주식회사 CREA FUTURE CORPORATION [KR]/[KR]
Inventors
  • 송문섭 SONG, Moon Soeb
  • 김영선 KIM, Young Sun
Agents
  • 양성환 YANG, Seong Hwan
Priority Data
10-2019-005588113.05.2019KR
10-2019-005588713.05.2019KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) METHOD FOR MANUFACTURING MOLD FOR MANUFACTURING FINE METAL MASK, AND METHOD FOR MANUFACTURING FINE METAL MASK
(FR) PROCÉDÉ DE FABRICATION D'UN MOULE DESTINÉ À LA FABRICATION D'UN MASQUE MÉTALLIQUE FIN, ET PROCÉDÉ DE FABRICATION DE MASQUE MÉTALLIQUE FIN
(KO) 파인메탈마스크 제조용 몰드 제조방법 및 파인메탈마스크 제조방법
Abstract
(EN)
Presented are: a method for manufacturing a mold for manufacturing a fine metal mask, the method being capable of obtaining a mold capable of manufacturing a fine metal mask that can be used permanently so as to save on material costs and that has improved productivity, wherein the mold enables the manufacture of a large-area fine metal mask and the manufacture of a fine metal mask having improved yield through a reduction in the rate of processing defects; and a method for manufacturing a fine metal mask. The method for manufacturing a mold for manufacturing a fine metal mask, according to the present invention, comprises the steps of: forming, on a manufacturing substrate, an insulation part corresponding to the slot shape of a fine metal mask; forming a conductive layer on the surface of the insulation part; forming, on the manufacturing substrate, a first metal layer through electroformation, and separating same therefrom so as to form a premold; and forming, on the premold, a second metal layer through electroformation, and separating same therefrom so as to form a mold for manufacturing a fine metal mask.
(FR)
L'invention concerne : un procédé de fabrication d'un moule destiné à la fabrication d'un masque métallique fin, le procédé permettant d'obtenir un moule pouvant fabriquer un masque métallique fin qui peut être utilisé de façon permanente de manière à économiser des coûts matériels et qui a une productivité améliorée, le moule permettant la fabrication d'un masque métallique fin de grande surface et la fabrication d'un masque métallique fin ayant un rendement amélioré grâce à une réduction du taux de défauts de traitement ; et un procédé de fabrication d'un masque métallique fin. Le procédé de fabrication d'un moule destiné à la fabrication d'un masque métallique fin, selon la présente invention, comprend les étapes consistant : à former, sur un substrat de fabrication, une partie d'isolation correspondant à la forme d'une fente d'un masque métallique fin ; à former une couche conductrice sur la surface de la partie d'isolation ; à former, sur le substrat de fabrication, une première couche métallique par électroformation, et à la séparer de ce dernier de manière à former un pré-moule ; et à former, sur le pré-moule, une seconde couche métallique par électroformation, et à la séparer de ce dernier de façon à former un moule destiné à la fabrication d'un masque métallique fin.
(KO)
영구사용이 가능하여 재료비가 절감되고 생산성이 향상된 파인메탈마스크를 제조할 수 있는 몰드를 얻을 수 있고, 대면적 파인메탈마스크 제조가 가능하면서도 공정불량률이 감소되어 수율이 향상된 파인메탈마스크를 제조할 수 있는 파인메탈마스크 제조용 몰드 제조방법 및 파인메탈마스크 제조방법이 제안된다. 본 발명에 따른 파인메탈마스크 제조용 몰드 제조방법은 제조기판 상에 파인메탈마스크의 슬롯형상에 대응하는 절연부를 형성하는 단계; 절연부의 표면에 전도성층을 형성하는 단계; 제조기판 상에 전주도금공정으로 제1금속층을 형성하고 분리하여 예비몰드를 형성하는 단계; 및 예비몰드 상에 전주도금공정으로 제2금속층을 형성하고 분리하여 파인메탈마스크 제조용 몰드를 형성하는 단계;를 포함한다.
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