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1. WO2020230674 - MOUNTING TABLE AND METHOD FOR FABRICATING MOUNTING TABLE

Publication Number WO/2020/230674
Publication Date 19.11.2020
International Application No. PCT/JP2020/018444
International Filing Date 01.05.2020
IPC
H01L 21/66 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
G01R 31/26 2020.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
26Testing of individual semiconductor devices
Applicants
  • 東京エレクトロン株式会社 TOKYO ELECTRON LIMITED [JP]/[JP]
Inventors
  • 河西 繁 KASAI, Shigeru
Agents
  • 金本 哲男 KANEMOTO, Tetsuo
  • 萩原 康司 HAGIWARA, Yasushi
  • 扇田 尚紀 OGITA, Naoki
  • 三根 卓也 MINE, Takuya
Priority Data
2019-09010410.05.2019JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) MOUNTING TABLE AND METHOD FOR FABRICATING MOUNTING TABLE
(FR) TABLE DE MONTAGE ET PROCÉDÉ DE FABRICATION DE TABLE DE MONTAGE
(JA) 載置台及び載置台の作製方法
Abstract
(EN)
This mounting table is for mounting an inspection object thereon, and has: a top panel part, on a front surface of which the inspection object is to be mounted; a flow channel forming member that is attached to the rear surface of the top panel part so as to form, between said member and the top panel part, a refrigerant flow channel through which a refrigerant capable of allowing light to transmit therethrough flows; and a light irradiation mechanism that is disposed so as to face, with the flow channel forming member therebetween, the inspection object mounted on the top panel part and that has a plurality of LEDs directed at the inspection object, wherein the flow channel forming member is composed of a glass which allows light to transmit therethrough, and the top panel part is composed of silicon.
(FR)
L'invention concerne une table de montage qui est destinée à monter un objet d'inspection sur celle-ci, et qui comprend : une partie de panneau supérieur, sur une surface avant sur laquelle l'objet d'inspection doit être monté ; un élément de formation de canal d'écoulement qui est fixé à la surface arrière de la partie de panneau supérieur de façon à former, entre ledit élément et la partie de panneau supérieur, un canal d'écoulement de fluide frigorigène à travers lequel un fluide frigorigène capable de permettre à la lumière de transmettre à travers celui-ci s'écoule ; et un mécanisme d'irradiation de lumière qui est disposé de manière à faire face, avec l'élément de formation de canal d'écoulement entre eux, l'objet d'inspection monté sur la partie de panneau supérieur et qui a une pluralité de DEL dirigées vers l'objet d'inspection, l'élément de formation de canal d'écoulement étant composé d'un verre qui permet la transmission de la lumière à travers celui-ci, et la partie de panneau supérieur est composée de silicium.
(JA)
検査対象体が載置される載置台であって、表面に前記検査対象体が載置される天板部と、前記天板部の裏面に取り付けられ、前記天板部との間に光を透過可能な冷媒が流れる冷媒流路を形成する流路形成部材と、前記天板部に載置された前記検査対象体と前記流路形成部材を介して対向するように配置され、当該検査対象体を指向する複数のLEDを有する光照射機構とを有し、前記流路形成部材は、光を透過可能なガラスからなり、前記天板部はシリコンからなる。
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